• DocumentCode
    3295333
  • Title

    Optical fiber fabry-perot pressure sensor machined by Nd:YAG laser

  • Author

    Junfeng Jiang ; Tiegen Liu ; Kun Liu ; Lijuan Jiang ; Xiao Liang ; Yu Liu ; Meng Wang ; Cong Xu ; Yimo Zhang ; Xuejin Li

  • Author_Institution
    Key Lab. of Opto Electron. Inf. & Tech. Sci., Tianjin Univ., Tianjin, China
  • fYear
    2010
  • fDate
    24-27 Oct. 2010
  • Firstpage
    112
  • Lastpage
    115
  • Abstract
    Through laser ablation process, a diaphragm with mesa structure is fabricated successfully in silicon wafer with Nd:YAG laser machining system. Then the silicon diaphragm is used to make optical fiber Fabry-Perot pressure sensor. The pressure sensing experiment showed the sensor had a good linear response with sensitivity 10.6 nm/kPa at the range 40-240 kPa.
  • Keywords
    fibre optic sensors; laser ablation; laser beam machining; neodymium; pressure sensors; solid lasers; Si; YAG:Nd; laser ablation process; laser machining system; linear response; mesa structure; optical fiber Fabry-Perot pressure sensor machined; silicon diaphragm; silicon wafer; Optical fiber Fabry-Perot; Pressure sensor; Sensors; diaphragm; laser ablation; silicon;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Optical Communications and Networks (ICOCN 2010), 9th International Conference on
  • Conference_Location
    Nanjing
  • Type

    conf

  • DOI
    10.1049/cp.2010.1165
  • Filename
    5778427
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3295333