Title :
Optical fiber fabry-perot pressure sensor machined by Nd:YAG laser
Author :
Junfeng Jiang ; Tiegen Liu ; Kun Liu ; Lijuan Jiang ; Xiao Liang ; Yu Liu ; Meng Wang ; Cong Xu ; Yimo Zhang ; Xuejin Li
Author_Institution :
Key Lab. of Opto Electron. Inf. & Tech. Sci., Tianjin Univ., Tianjin, China
Abstract :
Through laser ablation process, a diaphragm with mesa structure is fabricated successfully in silicon wafer with Nd:YAG laser machining system. Then the silicon diaphragm is used to make optical fiber Fabry-Perot pressure sensor. The pressure sensing experiment showed the sensor had a good linear response with sensitivity 10.6 nm/kPa at the range 40-240 kPa.
Keywords :
fibre optic sensors; laser ablation; laser beam machining; neodymium; pressure sensors; solid lasers; Si; YAG:Nd; laser ablation process; laser machining system; linear response; mesa structure; optical fiber Fabry-Perot pressure sensor machined; silicon diaphragm; silicon wafer; Optical fiber Fabry-Perot; Pressure sensor; Sensors; diaphragm; laser ablation; silicon;
Conference_Titel :
Optical Communications and Networks (ICOCN 2010), 9th International Conference on
Conference_Location :
Nanjing
DOI :
10.1049/cp.2010.1165
