Title :
Nano-Pattering on the Basis of Germanium Compositions Using Scanning Probe Microscopy
Author :
Astankova, Kseniya N. ; Gorokhov, Evgeny B. ; Sheglov, Dmitry V. ; Volodin, Vladimir A. ; Latyshev, Alexander V. ; Aseev, Alexander L.
Author_Institution :
Novosibirsk State Tech. Univ., Novosibirsk
fDate :
June 1 2007-July 5 2007
Abstract :
The possibility of formation of Ge-based nanowires with lateral resolution up to several nanometers using modification of GeO films by scanning probe microscope was demonstrated for the first time. The main advantage of used germanium monoxide films is its meta-stability and decomposition on Ge and GeO2 under impact of atomic force microscope probe.
Keywords :
germanium compounds; nanopatterning; nanowires; scanning probe microscopy; semiconductor thin films; Ge; GeO; atomic force microscope probe; decomposition; germanium based nanowires; germanium compositions; meta-stability; nanopatterning; scanning probe microscopy; semiconductor thin films; Atomic force microscopy; Conductive films; Germanium; Lithography; Nanostructures; Nanowires; Optical films; Scanning probe microscopy; Silicon; Substrates; Germanium oxide; atomic force microscope; germanium nanowires;
Conference_Titel :
Electron Devices and Materials, 2007. EDM '07. 8th Siberian Russian Workshop and Tutorial on
Conference_Location :
Erlagol, Altai
Print_ISBN :
978-5-7782-0752-3
DOI :
10.1109/SIBEDM.2007.4292918
