DocumentCode :
3295701
Title :
Layout debugging demonstration by FIB circuit edit
Author :
Chou, Po Fu ; Tsai, Chun Ming ; Shu, Yu Hsiang
Author_Institution :
United Microelectron. Corp., Ltd., Hsinchu, Taiwan
fYear :
2010
fDate :
5-9 July 2010
Firstpage :
1
Lastpage :
4
Abstract :
The FIB circuit editing is widely used in FA field, such as debugging, root cause demonstration and validating design changes. In this study, we will demonstrate the ability and benefit for circuit debugging, and the loading effect assumption was demonstrated by FIB circuit editing that the solution would easily be made. Meanwhile, the advanced circuit editing procedure will be introduced to improve the success rate in this investigation.
Keywords :
circuit layout; failure analysis; focused ion beam technology; semiconductor device reliability; FA field; FIB circuit editing; circuit debugging; focused ion beam; layout debugging demonstration; root cause demonstration; semiconductor failure analysis field; Chemicals; Circuit testing; Debugging; Electron beams; Etching; Failure analysis; Focusing; Ion beams; Particle beams; Scanning electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2010 17th IEEE International Symposium on the
Conference_Location :
Singapore
ISSN :
1946-1542
Print_ISBN :
978-1-4244-5596-6
Type :
conf
DOI :
10.1109/IPFA.2010.5531976
Filename :
5531976
Link To Document :
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