Title :
Layout debugging demonstration by FIB circuit edit
Author :
Chou, Po Fu ; Tsai, Chun Ming ; Shu, Yu Hsiang
Author_Institution :
United Microelectron. Corp., Ltd., Hsinchu, Taiwan
Abstract :
The FIB circuit editing is widely used in FA field, such as debugging, root cause demonstration and validating design changes. In this study, we will demonstrate the ability and benefit for circuit debugging, and the loading effect assumption was demonstrated by FIB circuit editing that the solution would easily be made. Meanwhile, the advanced circuit editing procedure will be introduced to improve the success rate in this investigation.
Keywords :
circuit layout; failure analysis; focused ion beam technology; semiconductor device reliability; FA field; FIB circuit editing; circuit debugging; focused ion beam; layout debugging demonstration; root cause demonstration; semiconductor failure analysis field; Chemicals; Circuit testing; Debugging; Electron beams; Etching; Failure analysis; Focusing; Ion beams; Particle beams; Scanning electron microscopy;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2010 17th IEEE International Symposium on the
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-5596-6
DOI :
10.1109/IPFA.2010.5531976