Title :
How do power supply voltage, pixel dwell time and test program duration affect the accuracy of Soft Defect Localization technique
Author :
Wu Chunlei ; Zhai, Lianyin ; Motohiko, Masuda ; Ma, Hui ; Wang, W. ; Liu, Jiangchuan ; Liu, Jiangchuan
Author_Institution :
Freescale Semicond. (China) Ltd., Tianjin, China
Abstract :
In our laboratory, Soft Defect Localization (SDL) technique without a synchronization signal is realized by Optical Beam Induced Resistance Change (OBIRCH). But the accuracy of this SDL technique depends on power supply voltage, pixel dwell time and test program duration. In this paper, we will present experimental results to show how to affect the accuracy of SDL technique by these three factors.
Keywords :
electron device testing; power supply circuits; optical beam induced resistance change; pixel dwell time; power supply voltage; soft defect localization technique; synchronization signal; test program duration affect; Frequency synchronization; Horses; Laboratories; Laser theory; Laser transitions; Microscopy; Power supplies; Semiconductor device testing; Temperature; Voltage;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2010 17th IEEE International Symposium on the
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-5596-6
DOI :
10.1109/IPFA.2010.5531979