• DocumentCode
    3295786
  • Title

    Automated handling of bio-nanowires for nanopackaging

  • Author

    Fatikow, S. ; Bartenwerfer, M. ; Krohs, F. ; Mikczinski, M. ; Niewiera, F. ; Weigel-Jech, M. ; Saketi, P. ; Kallio, P.

  • Author_Institution
    Div. Microrobotics & Control Eng., Univ. of Oldenburg, Oldenburg, Germany
  • fYear
    2010
  • fDate
    18-22 Oct. 2010
  • Firstpage
    3999
  • Lastpage
    4004
  • Abstract
    The integration of biomaterials into micro/nano-sensors or micro/nano-systems is expected to improve the properties of such systems or even lead to the development of novel innovative systems. A key problem to be solved beforehand is the development and realization of proper preparation, handling and manipulation methods with respect to an industrial usage. To enable such a usage, the methods have to be automatable, robust to environmental changes as well as feasible in a scanning electron microscope (SEM). According to these points, the target of the presented efforts is to develop these methods for a future design of nanoelectronic parts and to solve packaging problems at the nanoscale. As a consequence, the paper presents a novel concept for the usage of biomaterials, such as DNA and wood fibers/fibrils, for the packaging at the nanoscale. Novel methods for the DNA-handling with an atomic force microscope (AFM) at dry conditions, which can also be used in the vacuum chamber of a SEM will be presented as well as wood fibers/fibrils manipulation methods in the SEM.
  • Keywords
    atomic force microscopy; electronics packaging; grippers; nanoelectronics; nanowires; scanning electron microscopes; DNA-handling; atomic force microscope; automated bio-nanowires handling; electronic packaging; innovative systems; nanoelectronic part design; nanopackaging; scanning electron microscope; vacuum chamber;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Intelligent Robots and Systems (IROS), 2010 IEEE/RSJ International Conference on
  • Conference_Location
    Taipei
  • ISSN
    2153-0858
  • Print_ISBN
    978-1-4244-6674-0
  • Type

    conf

  • DOI
    10.1109/IROS.2010.5649313
  • Filename
    5649313