Title :
Aluminum planar thin film inductors
Author :
Surganov, V. ; Gorokh, G. ; Tochitskij, E.
Author_Institution :
Radio Engineering Institute
Keywords :
Aluminum; Coils; Conductors; Copper; Dielectric losses; Dielectric thin films; Frequency; Inductance; Q factor; Thin film inductors;
Conference_Titel :
Magnetics Conference, 1989. Digests of INTERMAG '89., International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/INTMAG.1989.690274
