Title :
Improving failure analysis navigation Using optical super resolved imaging
Author :
Gur, Eran ; Weizman, Yoav ; Zalevsky, Zeev
Author_Institution :
Shenkar Coll., Ramat Gan, Israel
Abstract :
The authors present a new numerical approach for improving the resolving power of low resolution images which is applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a high resolution layout image and a low resolution experimentally captured image of the same region of interest.
Keywords :
failure analysis; image resolution; iterative methods; microprocessor chips; optical images; failure analysis navigation; image resolution; microelectronic chip; numerical approach; optical super resolved imaging; Failure analysis; Geometrical optics; Image resolution; Lenses; Navigation; Optical devices; Optical imaging; Silicon; Solids; Spatial resolution;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2009. IPFA 2009. 16th IEEE International Symposium on the
Conference_Location :
Suzhou, Jiangsu
Print_ISBN :
978-1-4244-3911-9
Electronic_ISBN :
1946-1542
DOI :
10.1109/IPFA.2009.5232708
