DocumentCode :
3295947
Title :
A piezo-on-slider type linear ultrasonic motor for the application of positioning stages
Author :
Lim, Chee Kian ; He, Siyuan ; Chen, I-Ming ; Yeo, Song Huat
Author_Institution :
Sch. of Mech. & Production Eng., Nanyang Technol. Inst., Singapore
fYear :
1999
fDate :
1999
Firstpage :
103
Lastpage :
108
Abstract :
In this paper, a piezo-on-slider type linear ultrasonic motor (USM) for the application of positioning stages is described. The positioning stage driven by the piezo-on-slider type linear USM has a very simple and compact structure, which consists of a commercially available linear guide and the linear USM. The piezo-on-slider type linear ultrasonic motor is just a 60 mm×10 mm×3.5 mm rectangular plate. Quick response, no backlash, high resolution, off power self-braking and large working range are the attractive characteristics of this new type of linear positioning stages. The testing results of the stage are: moving range 220 mm (variable depending on the linear guide), no-load speed 80 mm/s, ratings 23 mms -1/300 gf, holding force 700 gf, starting thrust 500 gf, resolution <50 nm, response time of 12 ms from stationary status to constant velocity (80 mm/s) with a initial mass of 260 g
Keywords :
braking; linear motors; position control; ultrasonic motors; 12 ms; 220 mm; 260 g; 80 mm/s; linear ultrasonic motor; piezo-on-slider type; positioning; self-braking; Bidirectional control; Helium; Micromotors; Piezoelectric materials; Production engineering; Rails; Servomotors; Teeth; Testing; Torque;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Intelligent Mechatronics, 1999. Proceedings. 1999 IEEE/ASME International Conference on
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-5038-3
Type :
conf
DOI :
10.1109/AIM.1999.803150
Filename :
803150
Link To Document :
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