• DocumentCode
    3296070
  • Title

    Anomalous “sweeping stress” induced degradation in n-type low temperature poly-Si thin film transistors

  • Author

    Dapeng Zhou ; Mingxiang Wang ; Meng Zhang ; Han Hao ; Han, Hao ; Man Wong

  • Author_Institution
    Dept. of Microelectron., Soochow Univ., Suzhou, China
  • fYear
    2009
  • fDate
    6-10 July 2009
  • Firstpage
    807
  • Lastpage
    810
  • Abstract
    Anomalous "sweeping stress" induced degradation is first observed in n-type metal-induced laterally crystallized low temperature thin film transistors (TFTs). Key stress parameters include the maximum drain bias, the sweeping time and the number of sweeping. Degradation occurs only when the maximum drain bias exceeds a critical value. Both transfer and output characteristic degradation is found much similar to that of hot carrier (HC) degradation. But longer sweeping time causes larger degradation, which is opposite to that in dynamic HC degradation. Besides, such degradation can only be observed in low temperature crystallized TFTs.
  • Keywords
    elemental semiconductors; hot carriers; silicon; thin film transistors; anomalous sweeping stress induced degradation; crystallized low temperature thin film transistors; hot carrier degradation; maximum drain bias; n-type low temperature poly-Si thin film transistors; sweeping time; Annealing; Crystallization; Degradation; Hot carriers; Microelectronics; Pulse measurements; Stress; Temperature; Thin film transistors; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits, 2009. IPFA 2009. 16th IEEE International Symposium on the
  • Conference_Location
    Suzhou, Jiangsu
  • ISSN
    1946-1542
  • Print_ISBN
    978-1-4244-3911-9
  • Electronic_ISBN
    1946-1542
  • Type

    conf

  • DOI
    10.1109/IPFA.2009.5232717
  • Filename
    5232717