DocumentCode
3296260
Title
Radiation effects on mechanical characteristics of MEMS
Author
Wang, L. ; Huang, Q.A. ; Tang, J. ; Luo, J.
Author_Institution
Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China
fYear
2009
fDate
6-10 July 2009
Firstpage
764
Lastpage
767
Abstract
This paper reports radiation effects on mechanical characteristics of MEMS fixed-fixed beams and cantilevers after Co60 radiation. Radiation test is performed and resonant frequencies are measured by LDV. And stress relaxation has been recognized as main reason by theoretical analysis.
Keywords
beams (structures); cantilevers; micromechanical devices; radiation effects; stress relaxation; MEMS; cantilever; fixed-fixed beam; mechanical characteristics; radiation effect; radiation test; resonant frequency; stress relaxation; Electrostatics; Laboratories; Microelectromechanical devices; Micromechanical devices; Performance evaluation; Radiation effects; Resonant frequency; Structural beams; Temperature; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits, 2009. IPFA 2009. 16th IEEE International Symposium on the
Conference_Location
Suzhou, Jiangsu
ISSN
1946-1542
Print_ISBN
978-1-4244-3911-9
Electronic_ISBN
1946-1542
Type
conf
DOI
10.1109/IPFA.2009.5232728
Filename
5232728
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