Title :
Stress related anisotropy studies in DC-magnetron sputtered TbCo and TbFe films
Author :
Cheng, S.-C. ; Kryder, M.H. ; Mathur, M.C.A.
Author_Institution :
Carnegie Mellon University
Keywords :
Anisotropic magnetoresistance; Argon; Artificial intelligence; Helium; Hemorrhaging; Magnetometers; Resists; Stress; Substrates; Thick films;
Conference_Titel :
Magnetics Conference, 1989. Digests of INTERMAG '89., International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/INTMAG.1989.690287
