DocumentCode
3296731
Title
Research on the processing of vacuum microelectronic flat-panel displays
Author
Lu-jiang, Huangfu ; Chun, Zhu Chang ; Yong-Jing, Huai ; Zhi-Ling, Tie ; Yuming, Li ; Cailing, Guo
Author_Institution
Dept. of Electron. Eng., Xi´´an Jiaotong Univ., China
fYear
1996
fDate
7-12 Jul 1996
Firstpage
581
Lastpage
584
Abstract
The processing developed recently for vacuum microelectronic flat-panel nixies is described, including mainly how to fabricate the anode pillars (array) and the transparent flat-panel vacuum packages. Flat-panel nixies have been fabricated by the processing. The I-V characteristic between gates and cathodes was ideal. Field emission characteristic, accompanied by fluorescent light was also detected between cathodes and anodes. There are still some problems in maintaining the vacuum in package. The reasons are analyzed in the last part of the paper
Keywords
anodes; electron field emission; flat panel displays; large screen displays; vacuum microelectronics; I-V characteristic; anode pillars; field emission characteristic; flat-panel displays; fluorescent light; transparent flat-panel vacuum packages; vacuum microelectronics; Anodes; Displays; Dry etching; Electron tubes; Glass; Industrial electronics; Microelectronics; Packaging; Powders; Seals;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location
St. Petersburg
Print_ISBN
0-7803-3594-5
Type
conf
DOI
10.1109/IVMC.1996.601890
Filename
601890
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