DocumentCode
3296905
Title
Software for Silicon Ingots Parameters Measuring Equipment
Author
Anishchik, Vladimir
Author_Institution
Siberian State Geodetic Acad., Novosibirsk
fYear
2007
fDate
June 1 2007-July 5 2007
Firstpage
360
Lastpage
362
Abstract
Modernization of software for non- equilibrium charge carrier lifetime in silicon ingots measuring equipment was implemented. Reliability and speed of measuring system were increased. New methods of lifetime calculation were added. Software features were expanded.
Keywords
electronic engineering computing; ingots; semiconductor device measurement; lifetime calculation; measuring system reliability; nonequilibrium charge carrier; silicon ingots parameters measuring equipment; software modernization; Charge measurement; Current measurement; Graphics; Microwave devices; Microwave measurements; Microwave theory and techniques; Position measurement; Silicon; Software measurement; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2007. EDM '07. 8th Siberian Russian Workshop and Tutorial on
Conference_Location
Erlagol, Altai
ISSN
1815-3712
Print_ISBN
978-5-7782-0752-3
Type
conf
DOI
10.1109/SIBEDM.2007.4293005
Filename
4293005
Link To Document