• DocumentCode
    3297062
  • Title

    Hydrogen-containing SiCn protective films for magneto-optical media

  • Author

    Misaki, H. ; Asano, M. ; Kasai, K. ; Fukuda, M. ; Imamura, N.

  • Author_Institution
    Tosoh Corporation
  • fYear
    1989
  • fDate
    28-31 March 1989
  • Keywords
    Atmosphere; Conductive films; Hydrogen; Magnetic materials; Optical films; Optical refraction; Protection; Silicon compounds; Testing; Thermal expansion;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 1989. Digests of INTERMAG '89., International
  • Conference_Location
    Washington, DC, USA
  • Type

    conf

  • DOI
    10.1109/INTMAG.1989.690291
  • Filename
    690291