Title :
Hydrogen-containing SiCn protective films for magneto-optical media
Author :
Misaki, H. ; Asano, M. ; Kasai, K. ; Fukuda, M. ; Imamura, N.
Author_Institution :
Tosoh Corporation
Keywords :
Atmosphere; Conductive films; Hydrogen; Magnetic materials; Optical films; Optical refraction; Protection; Silicon compounds; Testing; Thermal expansion;
Conference_Titel :
Magnetics Conference, 1989. Digests of INTERMAG '89., International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/INTMAG.1989.690291