Title :
Uncertainties in Coplanar Waveguide Capacitance Measurements
Author :
Arz, Uwe ; Leinhos, Jens ; Schubert, Dirk
Author_Institution :
Phys.-Tech. Bundesanstalt, Braunschweig
Abstract :
We apply two capacitance measurement methods based on on-wafer scattering parameter measurements in the frequency range 50 MHz to 50 GHz to coplanar waveguides fabricated on different substrate materials. We discuss uncertainties obtained from repeated measurements and illustrate the effect of capacitance uncertainties on the reference impedance of thru-reflect-line (TRL) calibrations
Keywords :
III-V semiconductors; S-parameters; coplanar waveguides; gallium arsenide; 50 MHz to 50 GHz; GaAs; GaAs substrate; coplanar waveguide capacitance measurements; on-wafer scattering parameter measurements; substrate materials; thru-reflect-line calibrations; Calibration; Capacitance measurement; Conductors; Coplanar waveguides; Frequency; Impedance measurement; Measurement standards; Propagation constant; Scattering parameters; Substrates;
Conference_Titel :
Signal Propagation on Interconnects, 2006. IEEE Workshop on
Conference_Location :
Berlin, Germany
Print_ISBN :
1-4244-0455-x
Electronic_ISBN :
1-4244-0455-x
DOI :
10.1109/SPI.2006.289162
