DocumentCode :
3297239
Title :
Field emission properties of diamond thin films
Author :
Bakhtizin, R.Z. ; Yamaguzing, Yu.M. ; Pshenichnyuk, S.A.
Author_Institution :
Dept of Phys. Electron., Bashkir State Univ., Ufa, Russia
fYear :
1996
fDate :
7-12 Jul 1996
Firstpage :
658
Abstract :
Summary form only given, as follows. Si tips coated with thin diamond films show considerable promise for use in field emission cathodes because these films demonstrate an air-stable negative electron affinity surface. Such a surface may allow for fields emission at low electric field under poor vacuum conditions. In this work, a new technique for preparation of high quality diamond films with low impurity contamination has been developed. This technique is based on deposition of low energy C+ ions. These ions have been generated in duoplasmatron and directed to the Si tip via the beam forming system and mass-separation with Wien´s filter. A study aimed an understanding the electronic properties of diamond adsorbed on the Si surface has been carried out by means of probe-hole I-V characteristics measurements and field emission electron spectroscopy as well. The paper reports on recent findings to emerge from the above study, and presents a pertinent model to explain the significant changes in energy spectra of field emitted electrons. Finally, we discuss the possible mechanism of electron transport in such a system
Keywords :
diamond; electron affinity; electron field emission; electron spectroscopy; elemental semiconductors; semiconductor growth; semiconductor thin films; silicon; vacuum microelectronics; vapour deposited coatings; vapour deposition; C-Si; Si; Wien filter; air-stable negative electron affinity surface; beam forming system; diamond coated Si tips; diamond thin films; duoplasmatron; electron transport; electronic properties; energy spectra; field emission cathodes; field emission electron spectroscopy; field emission properties; high quality film preparation; low energy C+ ion deposition; low impurity contamination; mass-separation; model; probe-hole I-V characteristics measurements; Cathodes; Electron emission; Filters; Impurities; Pollution measurement; Semiconductor films; Spectroscopy; Surface contamination; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
Type :
conf
DOI :
10.1109/IVMC.1996.601915
Filename :
601915
Link To Document :
بازگشت