Title :
Micro-electromechanical variable capacitors for RF applications
Author :
Tsang, Tommy K K ; El-Gama, Mourad N.
Author_Institution :
Microelectron. & Comput. Syst. Lab., McGill Univ., Montreal, Que., Canada
Abstract :
This paper presents the principle of operation and design equations of MEMS-based variable capacitors designed using the MUMPs technology. Two prototypes with different tuning characteristics are examined. Measurements have shown that a tuning range of more than 35% is achievable at 2.4 GHz, with a self-resonant frequency of 4 GHz, and a maximum quality factor of 15. An analysis of the performance obtained is discussed, in the context of the characteristics of the fabrication process used.
Keywords :
Q-factor; micromechanical devices; varactors; 2.4 GHz; 4 GHz; MEMS variable capacitor; MUMPs technology; RF passive component; fabrication process; quality factor; self-resonant frequency; tuning range; Application software; Capacitors; Gold; Micromachining; Micromechanical devices; Radio frequency; Springs; Switches; Tuning; Varactors;
Conference_Titel :
Circuits and Systems, 2002. MWSCAS-2002. The 2002 45th Midwest Symposium on
Print_ISBN :
0-7803-7523-8
DOI :
10.1109/MWSCAS.2002.1187144
