Piezocomposite of fine PZT rods realized with synchrotron radiation lithography

A ceramics micro fabrication technique has been developed for the 1-3 piezocomposite which is suitable for high frequency, wideband ultrasound transducers. This process employs synchrotron radiation (SR) lithography and a micro molding process, generally called the “LIGA process”. This process realized an array of lead zirconate titanate (PZT) rods whose cross section is 25 micron. The composite made up of circular sectional PZT rods was clarified not to have an internal lateral frequency mode and it is available over a wide frequency range. The piezocomposite was clarified as having predicted merits, and was thought to contribute to the improvement of the resolution