Title :
Hysteresis compensation for Piezoelectric tube scanner in atomic force microscopy
Author :
Othman, Yahya Sherif ; Mahmood, Iskandar A. ; Rashid, Nahrul Khair Alang Md
Author_Institution :
Dept. of Mechatron. Eng., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia
Abstract :
In this paper, a radial basis function neural network (RBFNN) is designed and used for such purpose. The network is used in conjunction with a self-tuning PID controller. The differential equation of Jenkine element is adopted for hysteresis modeling. The simulation results show that the proposed controller improves the system performance better than open loop system and direct closed loop system by minimizing the effect of hysteresis.
Keywords :
atomic force microscopy; differential equations; piezoelectric devices; radial basis function networks; three-term control; Jenkine element; RBFNN; atomic force microscopy; hysteresis compensation; hysteresis modeling; piezoelectric tube scanner; radial basis function neural network; self-tuning PID controller; Atomic force microscopy; Electron tubes; Hysteresis; Laser beams; Mathematical model; Tracking loops;
Conference_Titel :
Enabling Science and Nanotechnology (ESciNano), 2012 International Conference on
Conference_Location :
Johor Bahru
Print_ISBN :
978-1-4577-0799-5
DOI :
10.1109/ESciNano.2012.6149633
