Title :
Toroidal inductors in CMOS processes
Author :
Vandi, Luca ; Andreani, Pietro ; Temporiti, Enrico ; Sacchi, Enrico ; Bietti, Ivan ; Ghezzi, Cesare ; Castello, Rinaldo
Author_Institution :
Center for Phys. Electron., Orsted-DTU, Lyngby, Denmark
Abstract :
This paper presents a toroidal inductor integrated in a standard 0.13 μm CMOS process. A very simple Π model for low frequencies is derived from 1-port and 2-port measurements, and a decent matching with general theory is observed. The coil exhibits an inductance of 1.1nH up to 20GHz (physical limit for the measurement equipment) and a quality factor approaching 10 at 15GHz. No self-resonance is observed within the measurement range.
Keywords :
CMOS integrated circuits; Q-factor; inductors; semiconductor device models; Π model; 0.13 micron; 1-port measurements; 15 GHz; 2-port measurements; CMOS process; quality factor; toroidal inductors; CMOS process; Coils; Frequency measurement; Inductance measurement; Inductors; Magnetic field measurement; Microelectronics; Radio frequency; Semiconductor device modeling; Toroidal magnetic fields;
Conference_Titel :
NORCHIP Conference, 2005. 23rd
Print_ISBN :
1-4244-0064-3
DOI :
10.1109/NORCHP.2005.1597047
