• DocumentCode
    3300523
  • Title

    Applications of image processing (IP) method on the structure measurements in porous GaN

  • Author

    Mahmood, Ainorkhilah ; Ahmed, Naser Mahmoud ; Ramizy, Asmiet ; Hassan, Zainuriah ; Kwong, Yam Fong ; Siang, Chuah Lee ; Yunus, Mohd Bukhari Md

  • Author_Institution
    Nano-Optoelectron. Res. & Technol. Lab., Univ. Sains Malaysia, Minden, Malaysia
  • fYear
    2012
  • fDate
    5-7 Jan. 2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In this work, porous GaN was prepared by UV assisted electrochemical etching method. This method was employed in this work due to several advantages such as low processing temperature, low structural damage, process simplicity, versatility and low processing cost. The sample is required to be connected to power supply and biased positive and ultra-violet (UV) illumination is used to assist in the generation of electron-hole pairs. The porous GaN structures fabrication and their quantitative structural characteristics study are based on mathematical morphology analysis by using the scanning electrons microscope (SEM) images. The quality of porous GaN quality can be carried out by performing a nondestructive investigation of its nanostructures which can be performed by adapting image analysis techniques to obtain rapid, objective and quantitative information.
  • Keywords
    III-V semiconductors; electrochemical analysis; etching; gallium compounds; image processing; nondestructive testing; porous semiconductors; scanning electron microscopy; semiconductor growth; ultraviolet spectra; wide band gap semiconductors; GaN; SEM; UV assisted electrochemical etching method; electron-hole pairs; image processing method; low processing cost; low processing temperature; low structural damage; mathematical morphology analysis; nondestructive investigation; porous structures fabrication; power supply; process simplicity; scanning electrons microscopy image; structural characteristics; structure measurements; ultra-violet illumination; versatility; Etching; Gallium nitride; Grain boundaries; MATLAB; Physics; Scanning electron microscopy; Surface morphology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Enabling Science and Nanotechnology (ESciNano), 2012 International Conference on
  • Conference_Location
    Johor Bahru
  • Print_ISBN
    978-1-4577-0799-5
  • Type

    conf

  • DOI
    10.1109/ESciNano.2012.6149665
  • Filename
    6149665