A MEMS actuator for integrated carbon nanotube strain sensing

We report on the performance of a multi-purpose strain sensor for embedded carbon nanotubes (CNT). The sensor is based on a microactuator operable in various environments including in situ scanning electron microscopy (SEM) and Raman microscopy from the same tube. The fabrication of the MEMS was outsourced to a foundry process first and then post-processed to integrate the nanotubes and to complete the sensor synthesis. The electrothermal actuator, applying tensile loads to the integrated nanotubes, is designed to decouple thermally and electrically from the device under test. The displacement resolution was investigated under SEM. We performed electrical and mechanical characterizations of the actuator as well as reliability tests. The fabrication of the system, together with the previously developed CNT integration process, is batch-fabrication compatible