DocumentCode
3301069
Title
A GasFET for chlorine detection
Author
Knittel, T. ; Freitag, Gunter ; Widanarto, W. ; Eisele, I.
Author_Institution
Inst. of Phys., German Fed. Armed Forces Univ., Munich
fYear
2005
fDate
Oct. 30 2005-Nov. 3 2005
Abstract
The work function potential shift due to the chemical reaction of gold in a chlorine gas ambient is electrically measured. The sensor principle is based on a hybrid suspended gate field effect transistor. Gas measurements show that at 190degC a reversible chlorine detection without any cross sensitivities to other gas species is possible
Keywords
field effect devices; gas sensors; 190 C; GasFET; chemical reaction; gold; hybrid suspended gate field effect transistor; reversible chlorine detection; CMOS technology; Chemical sensors; Chemical technology; Chemical transducers; Contacts; Electrodes; FETs; Gas detectors; Gold; MOSFETs;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2005 IEEE
Conference_Location
Irvine, CA
Print_ISBN
0-7803-9056-3
Type
conf
DOI
10.1109/ICSENS.2005.1597649
Filename
1597649
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