• DocumentCode
    3301337
  • Title

    Electrical instabilities and low-frequency noise in InGaZnO thin film transistors

  • Author

    Lee, Jong-Ho ; Kwon, Hyuck-In ; Shin, Hyungcheol ; Park, Byung-Gook ; Park, Young June

  • Author_Institution
    Sch. of Electr. & Electron. Eng., Chung-Ang Univ., Seoul, South Korea
  • fYear
    2010
  • fDate
    5-9 July 2010
  • Firstpage
    1
  • Lastpage
    7
  • Abstract
    Our recent works concerning the electrical instability and low frequency noise (LFN) behaviors of a-IGZO TFTs are reviewed and significant results are reported. The experimental and modeling study of bias-stress-induced threshold voltage instabilities shows that the threshold voltage shift is mainly attributed to the electron injection from the channel into interface/dielectric traps in a-IGZO TFTs. By comparing the results from devices with different dielectrics, we find that the magnitude and time dependence of the threshold voltage shift are strongly dependent on the gate dielectric material in a-IGZO TFTs. The measured noise power spectral density shows that the LFN in a-IGZO TFTs obeys the classical 1/f noise theory, i.e., fits well to a 1/fγ power law with γ ~ 1 in the low frequency range. From the dependence of normalized noise power spectral density on the gate voltage, the bulk mobility fluctuation is considered as a dominant LFN mechanism of a-IGZO TFTs in the linear operation regime.
  • Keywords
    1/f noise; circuit stability; dielectric materials; gallium compounds; indium compounds; interface states; thin film transistors; 1/f noise theory; IGZO TFT; InGaZnO; LFN behavior; bias-stress-induced threshold voltage instability; bulk mobility fluctuation; dielectric traps; electrical instability; electron injection; gate dielectric material; interface traps; low frequency noise; noise power spectral density; thin film transistor; threshold voltage shift; Density measurement; Dielectric devices; Dielectric materials; Dielectric measurements; Electron traps; Frequency measurement; Low-frequency noise; Power measurement; Thin film transistors; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits (IPFA), 2010 17th IEEE International Symposium on the
  • Conference_Location
    Singapore
  • ISSN
    1946-1542
  • Print_ISBN
    978-1-4244-5596-6
  • Type

    conf

  • DOI
    10.1109/IPFA.2010.5532306
  • Filename
    5532306