Title :
Two-dimensional FEM model for crystal resonators
Author :
Makkonen, Tapani ; Koskela, Julius ; Salomaa, Martti M.
Author_Institution :
Metrol. Res. Inst., Helsinki Univ. of Technol., Espoo, Finland
Abstract :
We have implemented a 2D FEM method for modeling BAW crystal resonators. Quadratic and cubic elements are employed for improved accuracy. In the cases amenable to 2D analysis, our modeling allows us to study the effects of resonator geometry, materials parameters, and crystal orientation on the resonator frequency response within the frequency range of interest. In particular, the dependence of the spurious resonances on the parameters chosen can be traced. The FEM model may be used to help in the optimization of device parameters in order to meet the specified resonator characteristics
Keywords :
acoustic resonators; crystal resonators; finite element analysis; BAW crystal resonator; two-dimensional FEM model; Crystalline materials; Equations; Frequency; Geometry; Mathematical model; Numerical models; Optical resonators; Physics; Resonance; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location :
Toronto, Ont.
Print_ISBN :
0-7803-4153-8
DOI :
10.1109/ULTSYM.1997.661737
