Title :
Thick-film PZT transducers for silicon micro machined sensor arrays
Author :
Hirsch, S. ; Doerner, S. ; Vélez, D. J Salazar ; Lucklum, R. ; Schmidt, B. ; Hauptmann, P.R. ; Ferrari, V. ; Ferrari, M.
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
Thick-film piezoelectric transducers have been produced and tested for implementation into a MEMS ultrasonic sensor array. The arrays are intended to be used for beam forming in sensing applications for fluidics in channels at millimeter or micrometer scale (e.g. flow rate measurement, detection of beads, bubbles). Stripe and matrix aligned elements have been fabricated for one-dimensional and two-dimensional beam steering, respectively. In this contribution we further concentrate on an improved Q-factor and PZT layer homogeneity as a major requirement for the transducer elements
Keywords :
Q-factor; microfluidics; microsensors; piezoelectric thin films; piezoelectric transducers; ultrasonic transducer arrays; 1D beam steering; 2D beam steering; MEMS ultrasonic sensor array; PZT layer homogeneity; Q-factor; beam forming; matrix aligned elements; microfluidics; silicon micromachined sensor arrays; stripe aligned elements; thick-film piezoelectric transducers; ultrasonic array; Fluid flow measurement; Fluidics; Micromechanical devices; Piezoelectric transducers; Sensor arrays; Silicon; Testing; Thick film sensors; Ultrasonic transducer arrays; Ultrasonic transducers;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597731
