Atto-liter periodical cavities for optical molecular detection

Author

Piciu, O.M. ; Krogt, M. C v d ; Sarro, P.M. ; Bossche, A. ; Docter, M.W.

Author_Institution

Dept. of Microelectron., Delft Univ. of Technol.

fYear

2005

fDate

Oct. 30 2005-Nov. 3 2005

Abstract

A process technology for fabrication of high quality nano-hole arrays in thin gold layers on glass substrates, suitable for biomolecular applications is presented. Making use of a bi-layer resist system, electron-beam lithography and a lift-off technique, different arrays of square-shaped nano-holes have been obtained. The holes dimensions are between 100nm and 200nm, with different lattice constants in each case. The arrays were furthermore optically characterized, showing uniformity and increased intensity of the out-coming light

Keywords

biomolecular electronics; electron beam lithography; molecular biophysics; nanoelectronics; nanostructured materials; resists; 100 to 200 nm; atto-liter periodical cavities; bilayer resist system; biomolecular applications; electron-beam lithography; glass substrates; lift-off technique; nanohole arrays; optical molecular detection; thin gold layers; Biomedical optical imaging; Gold; High speed optical techniques; Nanoscale devices; Optical arrays; Optical detectors; Optical devices; Optical films; Optical surface waves; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2005 IEEE

Conference_Location

Irvine, CA

Print_ISBN

0-7803-9056-3

Type

conf

DOI

10.1109/ICSENS.2005.1597733

Filename

1597733