Title :
Atto-liter periodical cavities for optical molecular detection
Author :
Piciu, O.M. ; Krogt, M. C v d ; Sarro, P.M. ; Bossche, A. ; Docter, M.W.
Author_Institution :
Dept. of Microelectron., Delft Univ. of Technol.
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
A process technology for fabrication of high quality nano-hole arrays in thin gold layers on glass substrates, suitable for biomolecular applications is presented. Making use of a bi-layer resist system, electron-beam lithography and a lift-off technique, different arrays of square-shaped nano-holes have been obtained. The holes dimensions are between 100nm and 200nm, with different lattice constants in each case. The arrays were furthermore optically characterized, showing uniformity and increased intensity of the out-coming light
Keywords :
biomolecular electronics; electron beam lithography; molecular biophysics; nanoelectronics; nanostructured materials; resists; 100 to 200 nm; atto-liter periodical cavities; bilayer resist system; biomolecular applications; electron-beam lithography; glass substrates; lift-off technique; nanohole arrays; optical molecular detection; thin gold layers; Biomedical optical imaging; Gold; High speed optical techniques; Nanoscale devices; Optical arrays; Optical detectors; Optical devices; Optical films; Optical surface waves; Substrates;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597733
