• DocumentCode
    3302732
  • Title

    A new and accurate quantum mechanical compact model for NMOS gate capacitance

  • Author

    Mudanai, S. ; Register, L.F. ; Tasch, A.F. ; Banerjee, S.K.

  • Author_Institution
    Microelectron. Res. Center, Texas Univ., Austin, TX, USA
  • fYear
    2001
  • fDate
    25-27 June 2001
  • Firstpage
    87
  • Lastpage
    88
  • Abstract
    A simple explicit analytic model is developed to generate an accurate sweep of the C-V curve from the oxide field. The quantum mechanical effects are intrinsically included in the estimation of the subband energies. Neither the substrate potential nor the polysilicon potential are pinned at any arbitrary value. So far only NMOS devices have been explicitly treated; the model will be extended to PMOS devices in the future. Work is also ongoing to allow band-bending and capacitance to be calculated directly as a function of voltage.
  • Keywords
    MOSFET; semiconductor device models; C-V curve; NMOS gate capacitance; polysilicon potential; quantum mechanical compact model; subband energies; substrate potential; Charge carrier processes; MOS devices; Microelectronics; Postal services; Quantum capacitance; Quantum mechanics; Semiconductor device doping; Semiconductor process modeling; Substrates; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference, 2001
  • Conference_Location
    Notre Dame, IN, USA
  • Print_ISBN
    0-7803-7014-7
  • Type

    conf

  • DOI
    10.1109/DRC.2001.937885
  • Filename
    937885