Title :
Excimer laser annealed, poly-Si thin film transistors for flat panel imager application
Author :
Lu, J.P. ; Van Schuylenbergh, K. ; Ho, J. ; Wang, Y. ; Nylen, P. ; Boyce, J.B. ; Street, R.A.
Author_Institution :
Xerox Palo Alto Res. Center, CA, USA
Abstract :
Pulsed Excimer-Laser Annealed (ELA) poly-Si Thin Film Transistor (TFT) technology has become an important technology for large area electronic applications. In this talk, we will report the progress and current status of our effort in building advanced flat panel imagers based on poly-Si TFT technology.
Keywords :
elemental semiconductors; image sensors; laser beam annealing; silicon; thin film transistors; Si; excimer laser annealing; flat panel imager; large-area electronics; polysilicon thin film transistor; Active matrix technology; Annealing; Driver circuits; Flat panel displays; Histograms; Leakage current; Pixel; Prototypes; Switches; Thin film transistors;
Conference_Titel :
Device Research Conference, 2001
Conference_Location :
Notre Dame, IN, USA
Print_ISBN :
0-7803-7014-7
DOI :
10.1109/DRC.2001.937927
