DocumentCode
3303468
Title
Excimer laser annealed, poly-Si thin film transistors for flat panel imager application
Author
Lu, J.P. ; Van Schuylenbergh, K. ; Ho, J. ; Wang, Y. ; Nylen, P. ; Boyce, J.B. ; Street, R.A.
Author_Institution
Xerox Palo Alto Res. Center, CA, USA
fYear
2001
fDate
25-27 June 2001
Firstpage
191
Lastpage
192
Abstract
Pulsed Excimer-Laser Annealed (ELA) poly-Si Thin Film Transistor (TFT) technology has become an important technology for large area electronic applications. In this talk, we will report the progress and current status of our effort in building advanced flat panel imagers based on poly-Si TFT technology.
Keywords
elemental semiconductors; image sensors; laser beam annealing; silicon; thin film transistors; Si; excimer laser annealing; flat panel imager; large-area electronics; polysilicon thin film transistor; Active matrix technology; Annealing; Driver circuits; Flat panel displays; Histograms; Leakage current; Pixel; Prototypes; Switches; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 2001
Conference_Location
Notre Dame, IN, USA
Print_ISBN
0-7803-7014-7
Type
conf
DOI
10.1109/DRC.2001.937927
Filename
937927
Link To Document