Title :
Piezoresistive signal down mixing for parallel detection of Si-based microcantilevers resonant frequencies
Author :
Mathieu, Fabrice ; Saya, Daisuke ; Nicu, Liviu ; Bergaud, Christian
Author_Institution :
LAAS-CNRS, Toulouse
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
We have developed piezoresistive micro-cantilevers to be used as displacement or force sensors associated with self-detection onboard electronic system. The aim of our work was to realize an integrated and compact detection system without the need of optical read-out scheme. The electronics developed specifically for this application allows, when dynamically operated, to follow each piezoresistive microcantilever resonance frequency (by achieving in the same time an enhancement of the quality factor) with an accuracy of 0.34 Hz
Keywords :
cantilevers; displacement measurement; elemental semiconductors; force measurement; force sensors; piezoresistive devices; silicon; Si; compact detection system; displacement sensors; force sensors; integrated detection system; onboard electronic system; optical readout scheme; parallel detection; piezoresistive microcantilever resonance frequency; piezoresistive signal down mixing; Boron; Bridge circuits; Capacitive sensors; Etching; Fabrication; Force sensors; Piezoresistance; Q factor; Resonance; Resonant frequency;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597797
