Title :
Relation between hot-carrier light emission and kink effect in poly-Si thin film transistors
Author :
Koyanagi, M. ; Kurino, H. ; Hashimoto, T. ; Mori, H. ; Hata, K. ; Hiruma, Y. ; Fujimori, T. ; Wu, I.-W. ; Lewis, A.G.
Author_Institution :
Res. Center for Integrated Syst., Hiroshima Univ., Japan
Abstract :
The kink effect in poly-Si TFTs (thin-film transistors) is evaluated by using a novel method based on kink current and hot carrier light emission measurements. It is revealed by examining the influence of the hydrogenation treatment on the kink current and measuring the temperature dependence of the kink current that the kink effect is significantly influenced by the grain boundary traps. Furthermore, it is found from the hot carrier light emission measurement that the energy distribution of hot carriers is not described by the Maxwell-Boltzmann distribution. The comparison between the kink current and the emitted light intensity suggests that both kink current and light emission basically originated from the hot carriers although the kink current characteristics are not always completely correlated with the light emission properties.<>
Keywords :
hot carriers; insulated gate field effect transistors; light emitting devices; thin film transistors; MOSFETs; emitted light intensity; grain boundary traps; hot-carrier light emission; hydrogenation treatment; kink current; kink effect; kink effect evaluation method; polycrystalline Si; temperature dependence; thin film transistors; Current measurement; Extrapolation; Grain boundaries; Hot carrier effects; Hot carriers; Impact ionization; Substrates; Temperature; Thin film transistors; Voltage;
Conference_Titel :
Electron Devices Meeting, 1991. IEDM '91. Technical Digest., International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-0243-5
DOI :
10.1109/IEDM.1991.235405