• DocumentCode
    3304820
  • Title

    MEMS inertial sensor toward higher accuracy & multi-axis sensing

  • Author

    Nakamura, Shigeru

  • Author_Institution
    R&D Center, Tokimec Inc., Tochigi
  • fYear
    2005
  • fDate
    Oct. 30 2005-Nov. 3 2005
  • Abstract
    This paper reports MEMS inertial sensor which is based on the principle of a rotational gyroscope can detect both 3-axis acceleration and 2-axis angular rate at a time by electrostatically suspending and rotating rotor in the shape of a ring made from silicon. The device has several advantages: the levitation of the rotor in a vacuum eliminates a mechanical friction resulting in high sensitivity; the position control for the levitation allows to sense accelerations in tri-axis. Latest measurements yield noise level of gyro and that of accelerometer as low as 0.002deg/s/Hzfrac12 and 20 muG/Hzfrac12, with 1.5mm diameter rotor at 74,000rpm
  • Keywords
    accelerometers; gyroscopes; microsensors; rotors; silicon; 2-axis angular rate; 3-axis acceleration; MEMS inertial sensor; Si; mechanical friction elimination; multiaxis sensing; position control; rotating rotor; rotational gyroscope; Acceleration; Electrostatic levitation; Electrostatic measurements; Friction; Gyroscopes; Micromechanical devices; Noise measurement; Position control; Shape; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2005 IEEE
  • Conference_Location
    Irvine, CA
  • Print_ISBN
    0-7803-9056-3
  • Type

    conf

  • DOI
    10.1109/ICSENS.2005.1597855
  • Filename
    1597855
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3304820