Title :
A MEMS resonant strain sensor with 33 nano-strain resolution in a 10 kHz bandwidth
Author :
Wojciechowski, K.E. ; Boser, B.E. ; Pisano, A.P.
Author_Institution :
Dept. of Electr. Eng., California Univ., Berkeley, CA
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
In this paper the authors demonstrate a high performance strain measurement system that consists of a polysilicon double ended tuning fork (DETF) resonant sensor and surface mount electronics to measure its output. This system achieves a resolution of 33 nano-strain (nepsiv) in a bandwidth of 10 kHz, and has a noise floor of 60 pico-strain per root hertz (pepsiv/radicHz) up to 1kHz. The 60 pepsiv/radicHz noise floor is equivalent to a displacement resolution of 12 femto-meters per root hertz (fm/radicHz). To the best of the author´s knowledge the smallest reported displacement resolution using surface micromachining is 16 fm/radicHz (Geen et al., 2002)
Keywords :
micromachining; microsensors; strain measurement; strain sensors; surface mount technology; vibrations; 10 kHz; MEMS resonant strain sensor; double ended tuning fork; surface micromachining; surface mount electronics; Bandwidth; Capacitive sensors; Counting circuits; Frequency modulation; Micromechanical devices; Phase locked loops; Resonance; Resonant frequency; Strain measurement; Voltage-controlled oscillators;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597857
