Title :
Optical polymer waveguide based cantilevers for chemical and biological sensors
Author :
Xu, Tao ; Chang, Ruisheng ; Bachman, Mark ; Li, Guann-Pyng
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Irvine, CA
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
A novel polymer optical waveguide cantilever-based transducer is presented in this paper. This cantilever-based transducer can be used for chemical and biological sensing in both air and liquid environments. Compared with current cantilever transducers, this particular transducer has high sensitivity due to an internal optical readout mechanism, yet is a simple structure without the need for complex optical adjustments, and can be potentially integrated with circuits on a single chip. Due to a low intrinsic Young´s modulus, the polymer cantilever is more flexible than those made of traditional semiconductor materials. Thus, it provides a larger degree of deflection and offers higher sensitivity to the adsorption of molecules, compared to other transducers. A deflection length of 50 nm has been verified
Keywords :
biosensors; cantilevers; chemical sensors; optical waveguide components; transducers; 50 nm; air environments; biological sensors; chemical sensors; liquid environments; low intrinsic Young modulus; molecules adsorption; optical waveguide cantilever-based transducer; optical waveguide cantilevers; polymer cantilever; polymer waveguide cantilever-based transducer; polymer waveguide cantilevers; single chip; Biomedical optical imaging; Chemical and biological sensors; Optical films; Optical interferometry; Optical polymers; Optical refraction; Optical sensors; Optical variables control; Optical waveguides; Transducers;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597861
