Title :
A process-compatible passive shutter for buried-channel chemical delivery probes
Author :
Papageorgiou, D. ; Bledsoe, S., Jr. ; Wise, K.D. ; Anderson, D.J.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
Passive shutters for buried-channel chemical delivery probes have been developed to limit diffusion from the probe channel into the external environment. Experiments show the addition of shutters decreases diffusion by a factor of approximately 20. The shutters are fully compatible with the usual probe process and require no additional masks
Keywords :
biocontrol; drug delivery systems; flow control; microfluidics; micromachining; microvalves; buried-channel chemical delivery probes; diffusion limiting; drug injection; etching; microfluidics; microshutters; neural probe; probe channel; process-compatible passive shutter; Auditory system; Boron; Chemical processes; Chemical vapor deposition; Drugs; Dry etching; Fabrication; Microchannel; Microfluidics; Probes;
Conference_Titel :
[Engineering in Medicine and Biology, 1999. 21st Annual Conference and the 1999 Annual Fall Meetring of the Biomedical Engineering Society] BMES/EMBS Conference, 1999. Proceedings of the First Joint
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-5674-8
DOI :
10.1109/IEMBS.1999.803990
