A microfabricated electrocutaneous tactile display

Author

Ostrom, Nels P. ; Kaczmarek, Kurt A. ; Beebe, David J.

Author_Institution

Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA

Volume

2

fYear

1999

fDate

36434

Abstract

An electrocutaneous tactile display was developed and built using modern microfabrication and lithographic techniques. Photosensitive polymers and ultra-thick photosensitive resists were used to fabricate closely spaced electrodes. Electrodes in the nine point array are spaced 2.4 mm (center-to-center), with 200 μm deep gaps between each electrode. The concentric 700 μm wide gap around each electrode prevents arcing and shorting

Keywords

electroplating; handicapped aids; haptic interfaces; microelectrodes; moulding; neuromuscular stimulation; photoresists; closely spaced electrodes; coaxial electrodes; electrocutaneous stimulation; electrocutaneous tactile display; electroplating; handicapped aids; haptic display; microfabrication; nine point array; photosensitive polymers; ultra-thick photosensitive resists; Biomedical electrodes; Coaxial components; Computer displays; Electrostatics; Energy consumption; Fabrication; Nickel; Polymers; Resists; Skin;

fLanguage

English

Publisher

ieee

Conference_Titel

[Engineering in Medicine and Biology, 1999. 21st Annual Conference and the 1999 Annual Fall Meetring of the Biomedical Engineering Society] BMES/EMBS Conference, 1999. Proceedings of the First Joint

Conference_Location

Atlanta, GA

ISSN

1094-687X

Print_ISBN

0-7803-5674-8

Type

conf

DOI

10.1109/IEMBS.1999.803993

Filename

803993