Title :
Geneating Solid Models for VLSI Process and Device Simulation
Author :
Lamb, Peter ; Hegarty, Christopher ; Hitschfeld, Nancy ; Fichtner, Wolfgang
Author_Institution :
CSIRO Division of Information Technology, Centre for Spatial Information Systems
fDate :
31 May-1 Jun 1992
Keywords :
Capacitance; Doping; Electromechanical sensors; Information geometry; Mesh generation; Semiconductor process modeling; Slabs; Solid modeling; Very large scale integration; Visualization;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
Print_ISBN :
0-7803-0516-7
DOI :
10.1109/NUPAD.1992.674100
