Title :
FISH & CHIPS: Four Electrode Conductivity / Salinity Sensor on a Silicon Multi-Sensor Chip for Fisheries Research
Author :
Hyldgård, A. ; Ólafsdottir, Í ; Olesen, M. ; Hedegaard, T. ; Hansen, O. ; Thomsen, E.V.
Author_Institution :
Dept. of Micro & Nanotechnology, Denmark Tech. Univ., Lyngby
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
The design and fabrication of a single chip silicon salinity, temperature, pressure and light multisensor is presented. The behavior 2- and 4-electrode conductivity microsensors are described and methods for precise determination of water conductivity are given
Keywords :
aquaculture; chemical sensors; electrical conductivity measurement; microsensors; pressure sensors; silicon; temperature sensors; Si; conductivity sensor; electrode conductivity microsensors; fisheries research; four electrode sensor; light multisensor; pressure multisensor; salinity sensor; silicon multisensor chip; single chip silicon salinity; temperature multisensor; water conductivity; Aquaculture; Conductivity; Electrodes; Electronic packaging thermal management; Fabrication; Marine animals; Sensor arrays; Silicon; Temperature sensors; Wiring;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597902
