Title :
Wafer-level testing of thermopile IR detectors
Author :
Mancarella, Fulvio ; Roncaglia, Alberto ; Passini, Mara ; Sanmartin, Michele ; Cardinali, Gian Carlo ; Severi, Maurizio
Author_Institution :
Inst. of Microelectron. & Microsystems, Italy Nat. Res. Council, Bologna
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
We propose a method to characterize the main figures of merit of IR thermopile detectors by means of electrical measurements performed at the wafer level. Finite element simulations are adopted in order to compare the results of wafer-level measurements with the actual device responsivity as expected by optical measurements. The employed finite-element model is validated by comparison with experimental data obtained on a micromachined thermal test structure
Keywords :
electron device testing; finite element analysis; infrared detectors; thermopiles; electrical measurements; finite element simulations; optical measurements; thermopile IR detectors; wafer-level measurements; wafer-level testing; Biomembranes; Electric variables measurement; Finite element methods; Infrared detectors; Optical devices; Optical noise; Performance evaluation; Silicon; Spirals; Testing;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597904
