Fabrication of Pt-Polysilicon Thin-Film Thermopiles: A Preliminary Study

Author

Mancarella, Fulvio ; Roncaglia, Alberto ; Tamarri, Fabrizio ; Pizzochero, Giulio ; Cardinali, Gian Carlo ; Severi, Maurizio

Author_Institution

Inst. of Microelectron. & Microsystems, National Res. Council, Bologna

fYear

2005

fDate

Oct. 30 2005-Nov. 3 2005

Firstpage

1141

Lastpage

1144

Abstract

A preliminary study is proposed aimed at developing a novel process for thin film thermopile detectors based on Pt-polysilicon thermoelements realized on a silicon substrate. Good contacts between Pt and heavily doped n and p-polysilicon have been achieved by using a Ti/TiN/Pt barrier structure. Step coverage of Pt on 300 nm high polysilicon steps obtained by RIE etching has been evaluated by wafer level measurements. The experimentally estimated process yield turns out to be higher than 90%. Mechanical stability of suspended dielectric structures covered with platinum has been evaluated by front-side micromachined test devices and the expected performance has been estimated by sensitivity tests on realized devices

Keywords

platinum; silicon; sputter etching; thermopiles; titanium compounds; 300 nm; RIE etching; Ti-TiN-Pt; dielectric structures; doped n polysilicon; doped p-polysilicon; high polysilicon steps; mechanical stability; micromachined test devices; poly silicon thin-film thermopile; silicon substrate; thin film thermopile detectors; wafer level measurements; Detectors; Etching; Fabrication; Level measurement; Semiconductor thin films; Silicon; Substrates; Testing; Tin; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2005 IEEE

Conference_Location

Irvine, CA

Print_ISBN

0-7803-9056-3

Type

conf

DOI

10.1109/ICSENS.2005.1597906

Filename

1597906