DocumentCode :
3305860
Title :
Technology Advances in Batch Production of Pt-Doped TiO2 Sol-Gel Oxygen Sensor
Author :
Francioso, Luca ; Presicce, Dominique Sara ; Siciliano, Pietro ; Epifani, Mauro
Author_Institution :
Sezione di Lecce, CNR-IMM, Lecce
fYear :
2005
fDate :
Oct. 30 2005-Nov. 3 2005
Firstpage :
1192
Lastpage :
1195
Abstract :
Aim of this work is the evaluation of a batch production fabrication run of a cheap sol-gel Pt-doped TiO2 thin film sensor on silicon substrate. The sensor is implemented as microsensors for lambda factor detection, while a preliminary investigation on real operative conditions shows that these devices perform a response time (t 90) in real condition around 1 second at 600 degC. Experimental tests in comparison with a commercial lambda probe were carried out
Keywords :
batch processing (industrial); gas sensors; microsensors; oxygen; platinum; sol-gel processing; thin film devices; titanium compounds; 600 C; TiO2:Pt; batch production fabrication; commercial lambda probe; lambda factor detection; microsensors; silicon substrate; sol-gel oxygen sensor; thin film sensor; Delay; Fabrication; Microsensors; Oxygen; Probes; Production; Silicon; Substrates; Testing; Thin film sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
Type :
conf
DOI :
10.1109/ICSENS.2005.1597919
Filename :
1597919
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3305860
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