3306013

Developing and Integrating TCAD Applications with the Semiconductor Wafer Representation

Bonning, D. ; Chin, G. ; Cottle, R. ; Dietrich, W. ; Duvall, S. ; Giles, M. ; Harris, R. ; Karasick, M. ; Khalil, N. ; Law, M. ; McLennan, M.J. ; Mozumder, P.K. ; Nackman, L. ; Nassif, S. ; Rajan, V.T. ; Schroeder, D. ; Tremain, R. ; Walker, D.M.H. ; Wang

Texas Instruments

1992

31 May-1 Jun 1992

199

204

Computer aided manufacturing; Data structures; Geometry; Instruments; Physics; Prototypes; Semiconductor device modeling; Software prototyping; Software tools; Standards development;

English

ieee

Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on

0-7803-0516-7

conf

10.1109/NUPAD.1992.674104

674104