DocumentCode
3306095
Title
Y-cut quartz resonator based calorimetric sensor
Author
Goyal, Abhijat ; Zhang, Yuyan ; Tadigadapa, Srinivas
Author_Institution
Dept. of Electr. Eng., Penn State Univ., University Park, PA
fYear
2005
fDate
Oct. 30 2005-Nov. 3 2005
Abstract
Monitoring of chemical and biochemical reactions such as neutralization reactions, antibody-antigen binding events, and enzyme catalyzed reactions, etc. can be achieved using calorimetric (bio)chemical sensors. A calorimeter array consisting of a thin film thermopile as temperature sensor integrated with microfluidic channels has already been demonstrated recently. In order to improve the sensitivity of the device, a temperature sensing element based on Y-cut quartz is proposed. The temperature-frequency calibration of a 125 mum thick Y-cut quartz resonator has been experimentally measured in the 22-60degC temperature range. Preliminary measurements of the neutralization reaction have been performed using the resonator to demonstrate the potential of the device for calorimetric sensing applications. It can be concluded that upon optimization of the device for thermal performance and appropriate compensation of mass loading and viscoelastic effects using a differential arrangement, ultrasensitive calorimetric measurements can be performed using such a device
Keywords
biochemistry; calorimetry; crystal resonators; temperature sensors; thermopiles; viscoelasticity; 125 micron; 22 to 60 C; Y-cut quartz resonator; biochemical sensor; calorimetric sensor; mass loading; microfluidic channel; neutralization reaction; temperature sensor; temperature-frequency calibration; thin film thermopile; viscoelastic effect; Biochemistry; Biosensors; Chemical and biological sensors; Chemical sensors; Microfluidics; Monitoring; Performance evaluation; Sensor arrays; Temperature sensors; Thin film sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2005 IEEE
Conference_Location
Irvine, CA
Print_ISBN
0-7803-9056-3
Type
conf
DOI
10.1109/ICSENS.2005.1597931
Filename
1597931
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