330613

Evaluation Of Lithographic Performance Of X-Ray Stepper XS-1

Taguchi, T. ; Mitsui, S. ; Tanaka, Y. ; Fujii, K. ; Sugihara, S. ; Yamaguchi, K. ; Kikuchi, Y. ; Tsuboi, S. ; Aoyama, H. ; Nakayama, N. ; Marumoto, K. ; Yamabe, M. ; Suzuki, K. ; Gomei, Y. ; Hisatsugu, T. ; Fukuda, M. ; Suzuki, M. ; Haga, T. ; Itabashi, S

Association of Super-Advanced Electronics Technologies (ASET)

1998

13-16 July 1998

19

20

Controllability; Electrons; Fabrication; Histograms; Laboratories; Optical reflection; Performance evaluation; Silicon compounds; Strontium; X-ray lithography;

English

ieee

Microprocesses and Nanotechnology Conference, 1998 International

Kyoungju, South Korea

4-930813-83-2

conf

10.1109/IMNC.1998.729924

729924