Title :
Thin Film Growths And Surface Modification By keV Ion Beams
Author :
Seok-Keun Koh ; Won-Kook Choi ; Hyung-Jin Jung ; Klalkina, E. ; Kondranin, S.
Author_Institution :
Thin Film Technology Research Center, Korea Institute of Science and Technology
Keywords :
Gas detectors; Ion beams; Ion sources; Plasma applications; Plasma sources; Polymer films; Research and development; Rough surfaces; Surface roughness; Transistors;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.729938
