DocumentCode

330633

Title

Development Of Silicon Based Inertial Sensor In SAIT

Author

Oh, Yongsoo

Author_Institution

Samsung Advanced Institute of Technology (SAIT)

fYear

1998

fDate

13-16 July 1998

Firstpage

58

Lastpage

59

Keywords

Accelerometers; Capacitive sensors; Capacitors; Electrodes; Electrostatics; Fabrication; Force sensors; Gyroscopes; Mechanical sensors; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.729962

Filename

729962