• DocumentCode
    3306419
  • Title

    Characterization of P-Type Cr:TiO2 Gas Sensor

  • Author

    Comini, E. ; Faglia, G. ; Sberveglieri, G. ; Alessandri, I. ; Bontempi, E. ; Depero, L.E.

  • Author_Institution
    Sensor Lab., Brescia Univ.
  • fYear
    2005
  • fDate
    Oct. 30 2005-Nov. 3 2005
  • Firstpage
    1320
  • Lastpage
    1322
  • Abstract
    Thin films of Cr-doped TiO2 have been deposited by RF magnetron sputtering, using for the first time a Ti target with a different numbers of Cr inserts. The influence of the Cr content and the annealing treatments upon the structure and the electrical conductivity of thin films have been investigated. The sensing behavior of selected series of samples has been tested to different gases like CO, NO2 and ethanol. P-type conductivity and sensing behavior has been obtained with an enhancement in the sensing performances of titania doped layers
  • Keywords
    annealing; chromium; gas sensors; organic compounds; sputtered coatings; titanium compounds; P-type conductivity; RF magnetron sputtering; TiO2:Cr; annealing treatment; electrical conductivity; ethanol; gas sensors; thin film; Annealing; Chemicals; Chromium; Conductivity; Gas detectors; Optical films; Sensor phenomena and characterization; Sputtering; Substrates; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2005 IEEE
  • Conference_Location
    Irvine, CA
  • Print_ISBN
    0-7803-9056-3
  • Type

    conf

  • DOI
    10.1109/ICSENS.2005.1597950
  • Filename
    1597950
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3306419