مرکز منطقه ای اطلاع رساني علوم و فناوري - Ring-Field EUV Exposure System Using Aspheric Mirrors

DocumentCode :

330643

Title :

Ring-Field EUV Exposure System Using Aspheric Mirrors

Author :

Murakarni, K. ; Oshino, T. ; Kinoshita, H. ; Watanabe, T. ; Niibe, M. ; Itou, M. ; Oizumi, H. ; Yamanashi, H.

Author_Institution :

Nikon Corporation

fYear :

1998

fDate :

13-16 July 1998

Firstpage :

Lastpage :

Keywords :

Laboratories; Mirrors;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location :

Kyoungju, South Korea

Print_ISBN :

4-930813-83-2

Type :

conf

DOI :

10.1109/IMNC.1998.729974

Filename :

729974

Link To Document :