Title :
Structural and electrical characterization of cobalt oxide p-type gas sensor
Author :
Comini, E. ; Faglia, G. ; Ferroni, M. ; Sberveglieri, G. ; Sacerdoti, M.
Author_Institution :
Sensor Lab., Brescia Univ.
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
Thin films of cobalt oxide have been prepared by reactive sputtering and the spinel CoCo2O4 structure together with p-type sensing behavior has been achieved. Structural and morphological studies have been carried out by means of SEM, TEM and XRI in order to investigate the correlation between the deposition parameter and the sensing performance. The films proved to be sensitive to ethanol, carbon oxide, benzene and nitrogen dioxide. It was also shown that annealing temperature influences the grain size of the nanosized cobalt oxide grains
Keywords :
X-ray diffraction; annealing; carbon compounds; cobalt compounds; gas sensors; grain size; nitrogen compounds; organic compounds; scanning electron microscopy; sputtering; transmission electron microscopy; CoCo2O4; SEM; TEM; XRI; annealing temperature; benzene; carbon oxide; cobalt oxide p-type gas sensor; cobalt oxide thin films; electrical characterization; ethanol; grain size; nitrogen dioxide; reactive sputtering; structural characterization; Cobalt; Gas detectors; Oxidation; Scanning electron microscopy; Sensor phenomena and characterization; Sputtering; Substrates; Thin film sensors; Transmission electron microscopy; X-ray scattering;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597951
