Title :
Photoresist Exposure Parameter Extraction From Refractive Index Change During Exposure
Author :
Young-Soo Sohn ; Moon-Gyu Sung ; Jin-Kyung Oh ; Sung-Hwan Byun ; Yeon-Un Jung ; Hye-Keun Oh ; Ilsin An ; Kun-Sang Lee ; In-Ho Park ; Joon-Yeon Cho ; Sang-Ho Lee
Author_Institution :
Hanyang University
Keywords :
Chemicals; Data mining; Extinction coefficients; Parameter extraction; Physics; Refractive index;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.729977
